The customer is a precision parts manufacturer for the semiconductor industry, primarily producing structural components for semiconductor equipment, precision guide rails, and the like. CMMs are high-precision geometric dimensioning inspection devices capable of micron- and nanometer-level measurements. They rely on guide rails, air bearings, linear scales, and precision probe assemblies to perform point acquisition and spatial computations, with motion accuracy of the core measurement components reaching micron or even sub-micron levels. During equipment operation, external vibrations can directly cause probe jitter and microscopic displacement of the CMM frame, making it impossible to meet the required tolerances for form, position, and dimensional accuracy of precision components. Widely used in high-end manufacturing fields such as aerospace, precision tooling, automotive parts, and semiconductors, CMMs are extremely sensitive to environmental vibrations; even minor vibration disturbances are magnified by the measurement system. Therefore, professional vibration isolation measures are essential.
**Solution**
To address the above issues, this vibration isolation project delivered Liva's VB-type pneumatic isolators, achieving excellent vibration protection performance.
**Core product advantages**
**Durable and easy-to-maintain material and structure**
Constructed with Neoprene rubber, integrally molded with metal, offering superior air-tightness and simple maintenance over the long term.
**Damping and resonance prevention**
Built-in liquid damping cylinder effectively suppresses vibration and prevents resonance with precision equipment such as CMMs.
**Broad adaptability for low-frequency isolation**
Natural frequency as low as 3–5 Hz, supporting both active and passive isolation modes to accommodate various types of precision equipment.
**Excellent isolation performance**
Based on the proprietary air isolation principle, achieving isolation efficiency of over 95%, perfectly matching the high-precision inspection requirements of CMMs.
This pneumatic isolator is widely used with various CMMs and represents a core product in Liva's dedicated precision measurement isolation sector. This project serves as an important practice in expanding Liva's service footprint for high-precision equipment isolation, fully demonstrating the brand's capability in delivering comprehensive isolation solutions for high-end precision quality inspection and its market competitiveness.
Product display images.
Based on its long-term development strategy, Liva will continue to uphold independent technological innovation, strictly control quality throughout the entire product lifecycle, and continuously iterate and optimize the low-frequency isolation performance and environmental adaptability of its spring, rubber, and pneumatic isolators. The company will deeply engage with upstream and downstream enterprises in the integrated circuit and precision semiconductor manufacturing supply chains, providing customized vibration isolation solutions for high-precision equipment such as lithography machines, coordinate measuring machines, and wafer inspection equipment. By delivering reliable domestically produced vibration control products, Liva aims to support the steady advancement of China's semiconductor industry toward self-reliance and large‑scale development.
