Recently, Liva Shanghai completed the bulk supply of VB-type pneumatic vibration isolators to an industrial manufacturing enterprise in Jiangsu Province. All products have been installed and commissioned on-site, establishing a long-term vibration damping protection system for the Serein coordinate measuring machine (CMM).
Project Introduction
The client is a semiconductor precision parts factory, primarily manufacturing structural components for semiconductor equipment, precision guide rails, and related parts.
Equipment Operating Conditions
A coordinate measuring machine (CMM) is a high-precision geometric dimension inspection device operating at micron and nanometer levels. It relies on guide rails, air bearings, linear encoders, and precision probe assemblies to perform point acquisition and spatial calculations. The motion accuracy of its core measuring components can reach micron or even sub-micron levels. During equipment operation, external vibration can directly cause probe jitter and micro-displacement of the machine body, rendering it unable to meet the inspection standards for form tolerances and dimensional accuracy of precision components.
CMMs are widely used in high-end manufacturing fields such as aerospace, precision tooling, automotive components, and semiconductors. These devices are extremely sensitive to environmental vibration—even minor vibration disturbances can be amplified by the measurement system—making professional vibration damping and isolation treatment an absolute necessity.
Solution
To address the above-mentioned issues, this vibration damping project delivered Liwa VB-type pneumatic vibration isolators, achieving excellent vibration isolation and protection results.
Product Core Advantages:
1.Durable Materials and Structure with Easy Maintenance
This pneumatic vibration isolator is widely used as a supporting component for various coordinate measuring machines (CMMs) and represents a core product in Liwa's deep commitment to the precision inspection vibration damping sector. This project marks an important practice in Liwa's expansion of its high-precision equipment vibration damping service footprint, fully demonstrating the brand's capability in delivering complete vibration isolation solutions in the high-end precision quality inspection field and its core market competitiveness.
Based on its long-term development strategy, Liva will continue to uphold independent technological innovation, strictly control product quality throughout the entire process, and continuously iterate and optimize the low-frequency vibration isolation performance and environmental adaptability of its spring, rubber, and pneumatic vibration isolators. The company will deeply engage with upstream and downstream enterprises in the integrated circuit and semiconductor precision manufacturing industry chains, providing customized vibration damping solutions for high-precision equipment such as photolithography machines, coordinate measuring machines (CMMs), and wafer inspection equipment. With reliable domestically produced vibration damping products, Liva aims to support the independent, large-scale, and steady development of China's semiconductor industry.
